JPH024796Y2 - - Google Patents

Info

Publication number
JPH024796Y2
JPH024796Y2 JP3258287U JP3258287U JPH024796Y2 JP H024796 Y2 JPH024796 Y2 JP H024796Y2 JP 3258287 U JP3258287 U JP 3258287U JP 3258287 U JP3258287 U JP 3258287U JP H024796 Y2 JPH024796 Y2 JP H024796Y2
Authority
JP
Japan
Prior art keywords
chamber
vacuum
pressure control
upper pressure
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3258287U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63145592U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3258287U priority Critical patent/JPH024796Y2/ja
Publication of JPS63145592U publication Critical patent/JPS63145592U/ja
Application granted granted Critical
Publication of JPH024796Y2 publication Critical patent/JPH024796Y2/ja
Expired legal-status Critical Current

Links

JP3258287U 1987-03-07 1987-03-07 Expired JPH024796Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3258287U JPH024796Y2 (en]) 1987-03-07 1987-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3258287U JPH024796Y2 (en]) 1987-03-07 1987-03-07

Publications (2)

Publication Number Publication Date
JPS63145592U JPS63145592U (en]) 1988-09-26
JPH024796Y2 true JPH024796Y2 (en]) 1990-02-05

Family

ID=30839398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3258287U Expired JPH024796Y2 (en]) 1987-03-07 1987-03-07

Country Status (1)

Country Link
JP (1) JPH024796Y2 (en])

Also Published As

Publication number Publication date
JPS63145592U (en]) 1988-09-26

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